में बचाया:
ग्रंथसूची विवरण
मुख्य लेखकों: Ye, Jixing, Boscardin, Maurizio, Vignali, Matteo Centis, Ficorella, Francesco, Ali, Omar Hammad, Lai, Adriano, Loi, Angelo, Monreal, Laura Parellada, Ronchin, Sabina, Betta, Gian-Franco Dalla
स्वरूप: Preprint
प्रकाशित: 2025
विषय:
ऑनलाइन पहुंच:https://arxiv.org/abs/2503.04272
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_version_ 1866915184153460736
author Ye, Jixing
Boscardin, Maurizio
Vignali, Matteo Centis
Ficorella, Francesco
Ali, Omar Hammad
Lai, Adriano
Loi, Angelo
Monreal, Laura Parellada
Ronchin, Sabina
Betta, Gian-Franco Dalla
author_facet Ye, Jixing
Boscardin, Maurizio
Vignali, Matteo Centis
Ficorella, Francesco
Ali, Omar Hammad
Lai, Adriano
Loi, Angelo
Monreal, Laura Parellada
Ronchin, Sabina
Betta, Gian-Franco Dalla
contents Future high-luminosity hadron collider experiments feature unprecedented levels of event pile-up and extreme radiation environments, calling for sensors capable of 4D tracking, even after significant radiation damage. To this purpose, 3D sensors represent a viable solution, since they provide excellent radiation tolerance and very good temporal resolution. In particular, owing to the uniform electric field and weighting field distributions, 3D-trench electrode sensors from the INFN TIMESPOT project have shown a temporal resolution of $\sim$10 ps after irradiation fluences up to 1$\times$10$^{17}$ 1-Mev n$_{eq}$/cm$^2$. In spite of the excellent performance of these sensors, 3D-trench pixel technology is not yet fully established and the fabrication yield is not yet adequate for the production of large size pixel sensors. To improve the potential of the 3D-trench concept for large-area sensors, a new batch of sensors was designed at the University of Trento and fabricated at FBK, as part of the AIDA Innova project. Besides introducing some process improvements, this batch includes two different sensor variants: the standard one with continuous ohmic trenches, and a modified one with dashed ohmic trenches. On-wafer electrical test results show that most of the sensors have low leakage current and high breakdown voltage. Moreover, the fabrication yield for the new design variant is higher than that of the standard design.
format Preprint
id arxiv_https___arxiv_org_abs_2503_04272
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle New developments in 3D-trench electrode sensors
Ye, Jixing
Boscardin, Maurizio
Vignali, Matteo Centis
Ficorella, Francesco
Ali, Omar Hammad
Lai, Adriano
Loi, Angelo
Monreal, Laura Parellada
Ronchin, Sabina
Betta, Gian-Franco Dalla
Instrumentation and Detectors
High Energy Physics - Experiment
Future high-luminosity hadron collider experiments feature unprecedented levels of event pile-up and extreme radiation environments, calling for sensors capable of 4D tracking, even after significant radiation damage. To this purpose, 3D sensors represent a viable solution, since they provide excellent radiation tolerance and very good temporal resolution. In particular, owing to the uniform electric field and weighting field distributions, 3D-trench electrode sensors from the INFN TIMESPOT project have shown a temporal resolution of $\sim$10 ps after irradiation fluences up to 1$\times$10$^{17}$ 1-Mev n$_{eq}$/cm$^2$. In spite of the excellent performance of these sensors, 3D-trench pixel technology is not yet fully established and the fabrication yield is not yet adequate for the production of large size pixel sensors. To improve the potential of the 3D-trench concept for large-area sensors, a new batch of sensors was designed at the University of Trento and fabricated at FBK, as part of the AIDA Innova project. Besides introducing some process improvements, this batch includes two different sensor variants: the standard one with continuous ohmic trenches, and a modified one with dashed ohmic trenches. On-wafer electrical test results show that most of the sensors have low leakage current and high breakdown voltage. Moreover, the fabrication yield for the new design variant is higher than that of the standard design.
title New developments in 3D-trench electrode sensors
topic Instrumentation and Detectors
High Energy Physics - Experiment
url https://arxiv.org/abs/2503.04272