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Low Thermal Budget High-k/Metal Surface Gate for Buried Donor-Based Devices

Fuente: arXiv
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Bibliographic Details
Main Authors: Anderson, Evan M., Campbell, DeAnna M., Maurer, Leon N., Baczewski, Andrew D., Marshall, Michael T., Lu, Tzu-Ming, Lu, Ping, Tracy, Lisa A., Schmucker, Scott W., Ward, Daniel R., Misra, Shashank
Format: Preprint
Published: 2020
Subjects:
Materials Science
Mesoscale and Nanoscale Physics
Applied Physics
Online Access:
Acceder al recurso
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