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Low Thermal Budget High-k/Metal Surface Gate for Buried Donor-Based Devices

Fuente: arXiv

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Bibliographic Details
Main Authors:	Anderson, Evan M., Campbell, DeAnna M., Maurer, Leon N., Baczewski, Andrew D., Marshall, Michael T., Lu, Tzu-Ming, Lu, Ping, Tracy, Lisa A., Schmucker, Scott W., Ward, Daniel R., Misra, Shashank
Format:	Preprint
Published:	2020
Subjects:	Materials Science Mesoscale and Nanoscale Physics Applied Physics
Online Access:	Acceder al recurso
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