Nanoscale control of LaAlO3/SrTiO3 metal-insulator transition using ultra-low-voltage electron-beam lithography

Fuente: arXiv
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Main Authors: Yang, Dengyu, Hao, Shan, Chen, Jun, Guo, Qing, Yu, Muqing, Hu, Yang, Eom, KiTae, Lee, Jung-Woo, Eom, Chang-Beom, Irvin, Patrick, Levy, Jeremy
Format: Preprint
Published: 2020
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author Yang, Dengyu
Hao, Shan
Chen, Jun
Guo, Qing
Yu, Muqing
Hu, Yang
Eom, KiTae
Lee, Jung-Woo
Eom, Chang-Beom
Irvin, Patrick
Levy, Jeremy
author_facet Yang, Dengyu
Hao, Shan
Chen, Jun
Guo, Qing
Yu, Muqing
Hu, Yang
Eom, KiTae
Lee, Jung-Woo
Eom, Chang-Beom
Irvin, Patrick
Levy, Jeremy
contents We describe a method to control the insulator-metal transition at the LaAlO3/SrTiO3 interface using ultra-low-voltage electron beam lithography (ULV-EBL). Compared with previous reports that utilize conductive atomic-force-microscope lithography (c-AFM), this approach can provide comparable resolution (~10 nm) at write speeds (10 mm/s) that are up to 10,000x faster than c-AFM. The writing technique is non-destructive and the conductive state is reversible via prolonged exposure to air. Transport properties of representative devices are measured at milli-Kelvin temperatures, where superconducting behavior is observed. We also demonstrate the ability to create conducting devices on graphene/LaAlO3/SrTiO3 heterostructures. The underlying mechanism is believed to be closely related to the same mechanism regulating c-AFM-based methods.
format Preprint
id arxiv_https___arxiv_org_abs_2008_12906
institution arXiv
publishDate 2020
record_format arxiv
spellingShingle Nanoscale control of LaAlO3/SrTiO3 metal-insulator transition using ultra-low-voltage electron-beam lithography
Yang, Dengyu
Hao, Shan
Chen, Jun
Guo, Qing
Yu, Muqing
Hu, Yang
Eom, KiTae
Lee, Jung-Woo
Eom, Chang-Beom
Irvin, Patrick
Levy, Jeremy
Mesoscale and Nanoscale Physics
We describe a method to control the insulator-metal transition at the LaAlO3/SrTiO3 interface using ultra-low-voltage electron beam lithography (ULV-EBL). Compared with previous reports that utilize conductive atomic-force-microscope lithography (c-AFM), this approach can provide comparable resolution (~10 nm) at write speeds (10 mm/s) that are up to 10,000x faster than c-AFM. The writing technique is non-destructive and the conductive state is reversible via prolonged exposure to air. Transport properties of representative devices are measured at milli-Kelvin temperatures, where superconducting behavior is observed. We also demonstrate the ability to create conducting devices on graphene/LaAlO3/SrTiO3 heterostructures. The underlying mechanism is believed to be closely related to the same mechanism regulating c-AFM-based methods.
title Nanoscale control of LaAlO3/SrTiO3 metal-insulator transition using ultra-low-voltage electron-beam lithography
topic Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2008.12906