Atomic Layer Deposition of Yttrium Iron Garnet Thin Films for 3D Magnetic Structures
Fuente:
arXiv
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| Main Authors: | Lammel, M., Scheffler, D., Pohl, D., Swekis, P., Reitzig, S., Reichlova, H., Schlitz, R., Geishendorf, K., Siegl, L., Rellinghaus, B., Eng, L. M., Nielsch, K., Goennenwein, S. T. B., Thomas, A. |
|---|---|
| Format: | Preprint |
| Published: |
2021
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| Online Access: | |
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