Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

Fuente: arXiv

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Bibliographic Details
Main Authors:	Masheyeva, R. U., Dzhumagulova, K. N., Myrzaly, M., Schulze, J., Donko, Z.
Format:	Preprint
Published:	2021
Subjects:	Plasma Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2105.01890