Copertina

Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Masheyeva, R. U., Dzhumagulova, K. N., Myrzaly, M., Schulze, J., Donko, Z.
Natura:	Preprint
Pubblicazione:	2021
Soggetti:	Plasma Physics
Accesso online:	Acceder al recurso
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