Kalarickal, N. K., Fiedler, A., Dhara, S., Rahman, M. W., Kim, T., Xia, Z., . . . Rajan, S. (2021). Planar and 3-dimensional damage free etching of $β$-Ga2O3 using atomic gallium flux.
Chicago Style (17th ed.) CitationKalarickal, Nidhin Kurian, et al. Planar and 3-dimensional Damage Free Etching of $β$-Ga2O3 Using Atomic Gallium Flux. 2021.
MLA (9th ed.) CitationKalarickal, Nidhin Kurian, et al. Planar and 3-dimensional Damage Free Etching of $β$-Ga2O3 Using Atomic Gallium Flux. 2021.
Warning: These citations may not always be 100% accurate.