Cita APA (7a ed.)

Yanguas-Gil, A., Libera, J. A., & Elam, J. W. (2021). Reactor scale simulations of ALD and ALE: Ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor.

Cita Chicago Style (17a ed.)

Yanguas-Gil, Angel, Joseph A. Libera, y Jeffrey W. Elam. Reactor Scale Simulations of ALD and ALE: Ideal and Non-ideal Self-limited Processes in a Cylindrical and a 300 Mm Wafer Cross-flow Reactor. 2021.

Cita MLA (9a ed.)

Yanguas-Gil, Angel, et al. Reactor Scale Simulations of ALD and ALE: Ideal and Non-ideal Self-limited Processes in a Cylindrical and a 300 Mm Wafer Cross-flow Reactor. 2021.