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Reactor scale simulations of ALD and ALE: ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Yanguas-Gil, Angel, Libera, Joseph A., Elam, Jeffrey W.
Format:	Preprint
Publié:	2021
Sujets:	Applied Physics Materials Science Fluid Dynamics
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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