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Ion energy distribution function in very high frequency capacitive discharges excited by sawtooth waveform

Fuente: arXiv

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Bibliographic Details
Main Authors:	Sharma, Sarveshwar, Sirse, Nishant, Kuley, Animesh, Turner, Miles M
Format:	Preprint
Published:	2021
Subjects:	Plasma Physics
Online Access:	Acceder al recurso
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