Solid Source Metal-Organic Molecular Beam Epitaxy of Epitaxial RuO2

Fuente: arXiv
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Autores principales: Nunn, William, Nair, Sreejith, Yun, Hwanhui, Manjeshwar, Anusha Kamath, Rajapitamahuni, Anil, Lee, Dooyong, Mkhoyan, K. Andre, Jalan, Bharat
Formato: Preprint
Publicado: 2021
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author Nunn, William
Nair, Sreejith
Yun, Hwanhui
Manjeshwar, Anusha Kamath
Rajapitamahuni, Anil
Lee, Dooyong
Mkhoyan, K. Andre
Jalan, Bharat
author_facet Nunn, William
Nair, Sreejith
Yun, Hwanhui
Manjeshwar, Anusha Kamath
Rajapitamahuni, Anil
Lee, Dooyong
Mkhoyan, K. Andre
Jalan, Bharat
contents A seemingly simple oxide with a rutile structure, RuO2 has been shown to possess several intriguing properties ranging from strain-stabilized superconductivity to a strong catalytic activity. Much interest has arisen surrounding the controlled synthesis of RuO2 films but, unfortunately, utilizing atomically-controlled deposition techniques like molecular beam epitaxy (MBE) has been difficult due to the ultra-low vapor pressure and low oxidation potential of Ru. Here, we demonstrate the growth of epitaxial, single-crystalline RuO2 films on different substrate orientations using the novel solid-source metal-organic (MO) MBE. This approach circumvents these issues by supplying Ru using a pre-oxidized solid metal-organic precursor containing Ru. High-quality epitaxial RuO2 films with bulk-like room-temperature resistivity of 55 micro-ohm-cm were obtained at a substrate temperature as low as 300 C. By combining X-ray diffraction, transmission electron microscopy, and electrical measurements, we discuss the effect of substrate temperature, orientation, film thickness, and strain on the structure and electrical properties of these films. Our results illustrating the use of novel solid-source MOMBE approach paves the way to the atomic-layer controlled synthesis of complex oxides of stubborn metals, which are not only difficult to evaporate but also hard to oxidize.
format Preprint
id arxiv_https___arxiv_org_abs_2107_00193
institution arXiv
publishDate 2021
record_format arxiv
spellingShingle Solid Source Metal-Organic Molecular Beam Epitaxy of Epitaxial RuO2
Nunn, William
Nair, Sreejith
Yun, Hwanhui
Manjeshwar, Anusha Kamath
Rajapitamahuni, Anil
Lee, Dooyong
Mkhoyan, K. Andre
Jalan, Bharat
Materials Science
Other Condensed Matter
A seemingly simple oxide with a rutile structure, RuO2 has been shown to possess several intriguing properties ranging from strain-stabilized superconductivity to a strong catalytic activity. Much interest has arisen surrounding the controlled synthesis of RuO2 films but, unfortunately, utilizing atomically-controlled deposition techniques like molecular beam epitaxy (MBE) has been difficult due to the ultra-low vapor pressure and low oxidation potential of Ru. Here, we demonstrate the growth of epitaxial, single-crystalline RuO2 films on different substrate orientations using the novel solid-source metal-organic (MO) MBE. This approach circumvents these issues by supplying Ru using a pre-oxidized solid metal-organic precursor containing Ru. High-quality epitaxial RuO2 films with bulk-like room-temperature resistivity of 55 micro-ohm-cm were obtained at a substrate temperature as low as 300 C. By combining X-ray diffraction, transmission electron microscopy, and electrical measurements, we discuss the effect of substrate temperature, orientation, film thickness, and strain on the structure and electrical properties of these films. Our results illustrating the use of novel solid-source MOMBE approach paves the way to the atomic-layer controlled synthesis of complex oxides of stubborn metals, which are not only difficult to evaporate but also hard to oxidize.
title Solid Source Metal-Organic Molecular Beam Epitaxy of Epitaxial RuO2
topic Materials Science
Other Condensed Matter
url https://arxiv.org/abs/2107.00193