Density functional theory calculations for investigation of atomic structures of 4H-SiC/SiO$_2$ interface after NO annealing

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Komatsu, Naoki, Ohmoto, Mizuho, Uemoto, Mitsuharu, Ono, Tomoya
Format:	Preprint
Published:	2022
Subjects:	Materials Science
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

https://arxiv.org/abs/2204.13870