Density functional theory calculations for investigation of atomic structures of 4H-SiC/SiO$_2$ interface after NO annealing
Fuente:
arXiv
Guardado en:
| Autores principales: | Komatsu, Naoki, Ohmoto, Mizuho, Uemoto, Mitsuharu, Ono, Tomoya |
|---|---|
| Formato: | Preprint |
| Publicado: |
2022
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| Materias: | |
| Acceso en línea: | |
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