Machine learning and atomic layer deposition: predicting saturation times from reactor growth profiles using artificial neural networks

Fuente: arXiv

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Bibliographic Details
Main Authors:	Yanguas-Gil, Angel, Elam, Jeffrey W.
Format:	Preprint
Published:	2022
Subjects:	Machine Learning Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2205.08378