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Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Fuente: arXiv

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Bibliographic Details
Main Authors:	Nakamura, Nathan, Szypryt, Paul, Dagel, Amber L., Alpert, Bradley K., Bennett, Douglas A., Doriese, W. Bertrand, Durkin, Malcolm, Fowler, Joseph W., Fox, Dylan T., Gard, Johnathon D., Goodner, Ryan N., Harris, J. Zachariah, Hilton, Gene C., Jimenez, Edward S., Kernen, Burke L., Larson, Kurt W., Levine, Zachary H., McArthur, Daniel, Morgan, Kelsey M., O'Neil, Galen C., Ortiz, Nathan J., Pappas, Christine G., Reintsema, Carl D., Schmidt, Daniel R., Schultz, Peter A., Thompson, Kyle R., Ullom, Joel N., Vale, Leila, Vaughan, Courtenay T., Walker, Christopher, Weber, Joel C., Wheeler, Jason W., Swetz, Daniel S.
Format:	Preprint
Published:	2022
Subjects:	Instrumentation and Detectors
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2212.10591