Experimental System Identification and Disturbance Observer-based Control for a Monolithic $Zθ_{x}θ_{y}$ Precision Positioning System

Fuente: arXiv
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Bibliographic Details
Main Authors: Ghafarian, Mohammadali, Shirinzadeh, Bijan, Al-Jodah, Ammar, Das, Tilok Kumar, Shen, Tianyao
Format: Preprint
Published: 2023
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