Experimental System Identification and Disturbance Observer-based Control for a Monolithic $Zθ_{x}θ_{y}$ Precision Positioning System
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arXiv
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| Main Authors: | Ghafarian, Mohammadali, Shirinzadeh, Bijan, Al-Jodah, Ammar, Das, Tilok Kumar, Shen, Tianyao |
|---|---|
| Format: | Preprint |
| Published: |
2023
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| Subjects: | |
| Online Access: | |
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