Room-Temperature Sputtered Ultralow-loss Silicon Nitride for Hybrid Photonic Integration

Fuente: arXiv
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Bibliographic Details
Main Authors: Zhang, Shuangyou, Bi, Toby, Harder, Irina, Lohse, Olga, Gannott, Florentina, Gumann, Alexander, Zhang, Yaojing, Del'Haye, Pascal
Format: Preprint
Published: 2023
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