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Room-Temperature Sputtered Ultralow-loss Silicon Nitride for Hybrid Photonic Integration

Fuente: arXiv

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Bibliographic Details
Main Authors:	Zhang, Shuangyou, Bi, Toby, Harder, Irina, Lohse, Olga, Gannott, Florentina, Gumann, Alexander, Zhang, Yaojing, Del'Haye, Pascal
Format:	Preprint
Published:	2023
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
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