Crystallization of piezoceramic films on glass via flash lamp annealing
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arXiv
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| Main Authors: | , , , , , , , |
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| Format: | Preprint |
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2023
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| _version_ | 1866914695155286016 |
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| author | Song, Longfei Cardoletti, Juliette Martinez, Alfredo Blazquez Bencan, Andreja Kmet, Brigita Girod, Stephanie Defay, Emmanuel Glinsek, Sebastjan |
| author_facet | Song, Longfei Cardoletti, Juliette Martinez, Alfredo Blazquez Bencan, Andreja Kmet, Brigita Girod, Stephanie Defay, Emmanuel Glinsek, Sebastjan |
| contents | Integration of thin-film oxide piezoelectrics on glass is imperative for the next generation of transparent electronics to attain sensing and actuating functions. However, their crystallization temperature (above 650 °C) is incompatible with most glasses. We developed a flash lamp process for growth of piezoelectric lead zirconate titanate films. The process enables crystallization on various types of glasses in a few seconds only. Functional properties of these films are comparable to the films processed with standard rapid thermal annealing at 700 °C. A surface haptic device was fabricated with a 1 $\unicode{x00B5}$m-thick film (piezoelectric e$_{33,f}$ of -5 C m$^{-2}$). Its ultrasonic surface deflection reached 1.5 $\unicode{x00B5}$m at 60 V, sufficient for its use in surface rendering applications. This flash lamp annealing process is compatible with large glass sheets and roll-to-roll processing and has the potential to significantly expand the applications of piezoelectric devices on glass. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2303_13103 |
| institution | arXiv |
| publishDate | 2023 |
| record_format | arxiv |
| spellingShingle | Crystallization of piezoceramic films on glass via flash lamp annealing Song, Longfei Cardoletti, Juliette Martinez, Alfredo Blazquez Bencan, Andreja Kmet, Brigita Girod, Stephanie Defay, Emmanuel Glinsek, Sebastjan Applied Physics Materials Science Integration of thin-film oxide piezoelectrics on glass is imperative for the next generation of transparent electronics to attain sensing and actuating functions. However, their crystallization temperature (above 650 °C) is incompatible with most glasses. We developed a flash lamp process for growth of piezoelectric lead zirconate titanate films. The process enables crystallization on various types of glasses in a few seconds only. Functional properties of these films are comparable to the films processed with standard rapid thermal annealing at 700 °C. A surface haptic device was fabricated with a 1 $\unicode{x00B5}$m-thick film (piezoelectric e$_{33,f}$ of -5 C m$^{-2}$). Its ultrasonic surface deflection reached 1.5 $\unicode{x00B5}$m at 60 V, sufficient for its use in surface rendering applications. This flash lamp annealing process is compatible with large glass sheets and roll-to-roll processing and has the potential to significantly expand the applications of piezoelectric devices on glass. |
| title | Crystallization of piezoceramic films on glass via flash lamp annealing |
| topic | Applied Physics Materials Science |
| url | https://arxiv.org/abs/2303.13103 |