CVD Graphene Contacts for Lateral Heterostructure MoS${_2}$ Field Effect Transistors

Fuente: arXiv
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Autori principali: Schneider, Daniel S., Lucchesi, Leonardo, Reato, Eros, Wang, Zhenyu, Piacentini, Agata, Bolten, Jens, Marian, Damiano, Marin, Enrique G., Radenovic, Aleksandra, Wang, Zhenxing, Fiori, Gianluca, Kis, Andras, Iannaccone, Giuseppe, Neumaier, Daniel, Lemme, Max C.
Natura: Preprint
Pubblicazione: 2023
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author Schneider, Daniel S.
Lucchesi, Leonardo
Reato, Eros
Wang, Zhenyu
Piacentini, Agata
Bolten, Jens
Marian, Damiano
Marin, Enrique G.
Radenovic, Aleksandra
Wang, Zhenxing
Fiori, Gianluca
Kis, Andras
Iannaccone, Giuseppe
Neumaier, Daniel
Lemme, Max C.
author_facet Schneider, Daniel S.
Lucchesi, Leonardo
Reato, Eros
Wang, Zhenyu
Piacentini, Agata
Bolten, Jens
Marian, Damiano
Marin, Enrique G.
Radenovic, Aleksandra
Wang, Zhenxing
Fiori, Gianluca
Kis, Andras
Iannaccone, Giuseppe
Neumaier, Daniel
Lemme, Max C.
contents Intensive research is carried out on two-dimensional materials, in particular molybdenum disulfide, towards high-performance transistors for integrated circuits. Fabricating transistors with ohmic contacts is challenging due to the high Schottky barrier that severely limits the transistors' performance. Graphene-based heterostructures can be used in addition or as a substitute for unsuitable metals. We present lateral heterostructure transistors made of scalable chemical vapor-deposited molybdenum disulfide and chemical vapor-deposited graphene with low contact resistances of about 9 k$Ω$$μ$m and high on/off current ratios of 10${^8}$. We also present a theoretical model calibrated on our experiments showing further potential for scaling transistors and contact areas into the few nanometers range and the possibility of a strong performance enhancement by means of layer optimizations that would make transistors promising for use in future logic circuits.
format Preprint
id arxiv_https___arxiv_org_abs_2304_01177
institution arXiv
publishDate 2023
record_format arxiv
spellingShingle CVD Graphene Contacts for Lateral Heterostructure MoS${_2}$ Field Effect Transistors
Schneider, Daniel S.
Lucchesi, Leonardo
Reato, Eros
Wang, Zhenyu
Piacentini, Agata
Bolten, Jens
Marian, Damiano
Marin, Enrique G.
Radenovic, Aleksandra
Wang, Zhenxing
Fiori, Gianluca
Kis, Andras
Iannaccone, Giuseppe
Neumaier, Daniel
Lemme, Max C.
Mesoscale and Nanoscale Physics
Applied Physics
Intensive research is carried out on two-dimensional materials, in particular molybdenum disulfide, towards high-performance transistors for integrated circuits. Fabricating transistors with ohmic contacts is challenging due to the high Schottky barrier that severely limits the transistors' performance. Graphene-based heterostructures can be used in addition or as a substitute for unsuitable metals. We present lateral heterostructure transistors made of scalable chemical vapor-deposited molybdenum disulfide and chemical vapor-deposited graphene with low contact resistances of about 9 k$Ω$$μ$m and high on/off current ratios of 10${^8}$. We also present a theoretical model calibrated on our experiments showing further potential for scaling transistors and contact areas into the few nanometers range and the possibility of a strong performance enhancement by means of layer optimizations that would make transistors promising for use in future logic circuits.
title CVD Graphene Contacts for Lateral Heterostructure MoS${_2}$ Field Effect Transistors
topic Mesoscale and Nanoscale Physics
Applied Physics
url https://arxiv.org/abs/2304.01177