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Accelerated deep self-supervised ptycho-laminography for three-dimensional nanoscale imaging of integrated circuits

Fuente: arXiv

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Bibliographic Details
Main Authors:	Kang, Iksung, Jiang, Yi, Holler, Mirko, Guizar-Sicairos, Manuel, Levi, A. F. J., Klug, Jeffrey, Vogt, Stefan, Barbastathis, George
Format:	Preprint
Published:	2023
Subjects:	Image and Video Processing Machine Learning Optics
Online Access:	Acceder al recurso
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