Hochreiter, A., Groß, F., Möller, M., Krieger, M., & Weber, H. B. (2023). Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers.
Chicago Style (17th ed.) CitationHochreiter, André, Fabian Groß, Morris-Niklas Möller, Michael Krieger, and Heiko B. Weber. Electrochemical Etching Strategy for Shaping Monolithic 3D Structures from 4H-SiC Wafers. 2023.
MLA (9th ed.) CitationHochreiter, André, et al. Electrochemical Etching Strategy for Shaping Monolithic 3D Structures from 4H-SiC Wafers. 2023.
Warning: These citations may not always be 100% accurate.