Improved Parameter Targeting in 3D-Integrated Superconducting Circuits through a Polymer Spacer Process

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Bibliographic Details
Main Authors:	Norris, Graham J., Michaud, Laurent, Pahl, David, Kerschbaum, Michael, Eichler, Christopher, Besse, Jean-Claude, Wallraff, Andreas
Format:	Preprint
Published:	2023
Subjects:	Quantum Physics Applied Physics
Online Access:	Acceder al recurso
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