Saved in:
Bibliographic Details
Main Author: Nečas, David
Format: Preprint
Published: 2023
Subjects:
Online Access:https://arxiv.org/abs/2308.11304
Tags: Add Tag
No Tags, Be the first to tag this record!
_version_ 1866910472177975296
author Nečas, David
author_facet Nečas, David
contents Scan line levelling, a ubiquitous and often necessary step in AFM data processing, can cause a severe bias on measured roughness parameters such as mean square roughness or correlation length. Although bias estimates have been formulated, they aimed mainly at assessing the severity of the problem for individual measurements. Practical bias correction methods are still missing. This work exploits the observation that the bias of autocorrelation function (ACF) can be expressed in terms of the function itself, permitting a self-consistent formulation. From this two correction approaches are developed, both with the aim to obtain convenient formulae which can be easily applied in practice. The first modifies standard analytical models of ACF to incorporate, in expectation, the bias and thus actually match the data the models are used to fit. The second inverts the relation between true and estimated ACF to realise a model-free correction. Both are tested using simulated and experimental data and found effective.
format Preprint
id arxiv_https___arxiv_org_abs_2308_11304
institution arXiv
publishDate 2023
record_format arxiv
spellingShingle Self-consistent autocorrelation for finite-area bias correction in roughness measurement
Nečas, David
Data Analysis, Statistics and Probability
Scan line levelling, a ubiquitous and often necessary step in AFM data processing, can cause a severe bias on measured roughness parameters such as mean square roughness or correlation length. Although bias estimates have been formulated, they aimed mainly at assessing the severity of the problem for individual measurements. Practical bias correction methods are still missing. This work exploits the observation that the bias of autocorrelation function (ACF) can be expressed in terms of the function itself, permitting a self-consistent formulation. From this two correction approaches are developed, both with the aim to obtain convenient formulae which can be easily applied in practice. The first modifies standard analytical models of ACF to incorporate, in expectation, the bias and thus actually match the data the models are used to fit. The second inverts the relation between true and estimated ACF to realise a model-free correction. Both are tested using simulated and experimental data and found effective.
title Self-consistent autocorrelation for finite-area bias correction in roughness measurement
topic Data Analysis, Statistics and Probability
url https://arxiv.org/abs/2308.11304