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Forward simulation of coherent beams on grating structures for coherent scatterometry

Fuente: arXiv

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Bibliographic Details
Main Authors:	Hammerschmidt, Martin, Zschiedrich, Lin, Siaudinyté, Lauryna, Manley, Phillip, Schneider, Philipp-Immanuel, Burger, Sven
Format:	Preprint
Published:	2023
Subjects:	Optics Computational Physics
Online Access:	Acceder al recurso
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