Direct in- and out-of-plane writing of metals on insulators by electron-beam-enabled, confined electrodeposition with submicrometer feature size

Fuente: arXiv

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Bibliographic Details
Main Authors:	Nydegger, Mirco, Wang, Zhu-Jun, Willinger, Marc, Spolenak, Ralph, Reiser, Alain
Format:	Preprint
Published:	2023
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2309.12824