Direct in- and out-of-plane writing of metals on insulators by electron-beam-enabled, confined electrodeposition with submicrometer feature size
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arXiv
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| Main Authors: | Nydegger, Mirco, Wang, Zhu-Jun, Willinger, Marc, Spolenak, Ralph, Reiser, Alain |
|---|---|
| Format: | Preprint |
| Published: |
2023
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| Subjects: | |
| Online Access: | |
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