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Multi-physics modeling of non-equilibrium phenomena in inductively coupled plasma discharges: Part I. A state-to-state approach

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Bibliographic Details
Main Authors:	Kumar, Sanjeev, Munafo, Alessandro, Jo, Sung Min, Panesi, Marco
Format:	Preprint
Published:	2023
Subjects:	Plasma Physics
Online Access:	Acceder al recurso
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