Isotropic atomic layer etching of MgO-doped lithium niobate using sequential exposures of H$_2$ and SF$_6$ plasmas

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Chen, Ivy I., Solgaard, Jennifer, Sekine, Ryoto, Hossain, Azmain A., Ardizzi, Anthony, Catherall, David S., Marandi, Alireza, Renzas, James R., Greer, Frank, Minnich, Austin J.
Format:	Preprint
Published:	2023
Subjects:	Mesoscale and Nanoscale Physics Materials Science Optics
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

https://arxiv.org/abs/2310.10592