Al$_3$Sc thin films for advanced interconnect applications

Fuente: arXiv

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Bibliographic Details
Main Authors:	Soulié, Jean-Philippe, Sankaran, Kiroubanand, Founta, Valeria, Opsomer, Karl, Detavernier, Christophe, Van de Vondel, Joris, Pourtois, Geoffrey, Tőkei, Zsolt, Swerts, Johan, Adelmann, Christoph
Format:	Preprint
Published:	2023
Subjects:	Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2310.20485