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Al$_3$Sc thin films for advanced interconnect applications

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Soulié, Jean-Philippe, Sankaran, Kiroubanand, Founta, Valeria, Opsomer, Karl, Detavernier, Christophe, Van de Vondel, Joris, Pourtois, Geoffrey, Tőkei, Zsolt, Swerts, Johan, Adelmann, Christoph
Format:	Preprint
Publié:	2023
Sujets:	Materials Science
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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