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Fabrication of quantum emitters in aluminium nitride by Al-ion implantation and thermal annealing

Fuente: arXiv

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Bibliographic Details
Main Authors:	Hernández, E. Nieto, Yağcı, H. B., Pugliese, V., Aprà, P., Cannon, J. K., Bishop, S. G., Hadden, J., Tchernij, S. Ditalia, Olivero, Bennett, A. J., Forneris, J.
Format:	Preprint
Published:	2023
Subjects:	Applied Physics Materials Science Quantum Physics
Online Access:	Acceder al recurso
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