Shot noise-mitigated secondary electron imaging with ion count-aided microscopy
Fuente:
arXiv
Saved in:
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Preprint |
| Published: |
2023
|
| Subjects: | |
| Online Access: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1866912959614156800 |
|---|---|
| author | Agarwal, Akshay Kasaei, Leila He, Xinglin Kitichotkul, Ruangrawee Hitit, Oguz Kagan Peng, Minxu Schultz, J. Albert Feldman, Leonard C. Goyal, Vivek K |
| author_facet | Agarwal, Akshay Kasaei, Leila He, Xinglin Kitichotkul, Ruangrawee Hitit, Oguz Kagan Peng, Minxu Schultz, J. Albert Feldman, Leonard C. Goyal, Vivek K |
| contents | Modern science is dependent on imaging on the nanoscale, often achieved through processes that detect secondary electrons created by a highly focused incident charged particle beam. Multiple types of measurement noise limit the ultimate trade-off between the image quality and the incident particle dose, which can preclude useful imaging of dose-sensitive samples. Existing methods to improve image quality do not fundamentally mitigate the noise sources. Furthermore, barriers to assigning a physically meaningful scale make the images qualitative. Here we introduce ion count-aided microscopy (ICAM), which is a quantitative imaging technique that uses statistically principled estimation of the secondary electron yield. With a readily implemented change in data collection, ICAM substantially reduces source shot noise. In helium ion microscopy, we demonstrate 3x dose reduction and a good match between these empirical results and theoretical performance predictions. ICAM facilitates imaging of fragile samples and may make imaging with heavier particles more attractive. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2311_07003 |
| institution | arXiv |
| publishDate | 2023 |
| record_format | arxiv |
| spellingShingle | Shot noise-mitigated secondary electron imaging with ion count-aided microscopy Agarwal, Akshay Kasaei, Leila He, Xinglin Kitichotkul, Ruangrawee Hitit, Oguz Kagan Peng, Minxu Schultz, J. Albert Feldman, Leonard C. Goyal, Vivek K Medical Physics Applied Physics Data Analysis, Statistics and Probability Instrumentation and Detectors Modern science is dependent on imaging on the nanoscale, often achieved through processes that detect secondary electrons created by a highly focused incident charged particle beam. Multiple types of measurement noise limit the ultimate trade-off between the image quality and the incident particle dose, which can preclude useful imaging of dose-sensitive samples. Existing methods to improve image quality do not fundamentally mitigate the noise sources. Furthermore, barriers to assigning a physically meaningful scale make the images qualitative. Here we introduce ion count-aided microscopy (ICAM), which is a quantitative imaging technique that uses statistically principled estimation of the secondary electron yield. With a readily implemented change in data collection, ICAM substantially reduces source shot noise. In helium ion microscopy, we demonstrate 3x dose reduction and a good match between these empirical results and theoretical performance predictions. ICAM facilitates imaging of fragile samples and may make imaging with heavier particles more attractive. |
| title | Shot noise-mitigated secondary electron imaging with ion count-aided microscopy |
| topic | Medical Physics Applied Physics Data Analysis, Statistics and Probability Instrumentation and Detectors |
| url | https://arxiv.org/abs/2311.07003 |