A high-efficiency programmable modulator for extreme ultraviolet light with nm feature size based on an electronic phase transition

Fuente: arXiv
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Bibliographic Details
Main Authors: Vaskivskyi, Igor, Mraz, Anze, Venturini, Rok, Jecl, Gregor, Vaskivskyi, Yevhenii, Mincigrucci, Riccardo, Foglia, Laura, De Angelis, Dario, Pelli-Cresi, Jacopo-Stefano, Paltanin, Ettore, Fainozzi, Danny, Bencivenga, Filippo, Masciovecchio, Claudio, Mihailovic, Dragan
Format: Preprint
Published: 2023
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