A high-efficiency programmable modulator for extreme ultraviolet light with nm feature size based on an electronic phase transition
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arXiv
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| Main Authors: | Vaskivskyi, Igor, Mraz, Anze, Venturini, Rok, Jecl, Gregor, Vaskivskyi, Yevhenii, Mincigrucci, Riccardo, Foglia, Laura, De Angelis, Dario, Pelli-Cresi, Jacopo-Stefano, Paltanin, Ettore, Fainozzi, Danny, Bencivenga, Filippo, Masciovecchio, Claudio, Mihailovic, Dragan |
|---|---|
| Format: | Preprint |
| Published: |
2023
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