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Properties of Nb\_xTi\_{(1-x)}N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits

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Bibliographic Details
Main Authors:	Lozano, Daniel Pérez, Soulié, Jean-Philippe, Hodges, Blake, Piao, Xiaoyu, O'Neal, Sabine, Valente-Feliciano, Anne-Marie, Herr, Quentin, Tőkei, Zsolt, Kim, Min-Soo, Herr, Anna
Format:	Preprint
Published:	2023
Subjects:	Superconductivity
Online Access:	Acceder al recurso
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