Reliable lift-off patterning of graphene dispersions for humidity sensors
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arXiv
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| Main Authors: | , , , , , , , , |
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| Format: | Preprint |
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2023
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| _version_ | 1866916356104912896 |
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| author | Estévez, Jorge Eduardo Adatti Hecht, Fabian Wittmann, Sebastian Sawallich, Simon Weber, Annika Travan, Caterina Hopperdietzl, Franz Krumbein, Ulrich Lemme, Max Christian |
| author_facet | Estévez, Jorge Eduardo Adatti Hecht, Fabian Wittmann, Sebastian Sawallich, Simon Weber, Annika Travan, Caterina Hopperdietzl, Franz Krumbein, Ulrich Lemme, Max Christian |
| contents | Dispersion-based graphene materials are promising candidates for various sensing applications. They offer the advantage of relatively simple and fast deposition via spin-coating, Langmuir-Blodgett deposition, or inkjet printing. Film uniformity and reproducibility remain challenging in all of these deposition methods. Here, we demonstrate, characterize, and successfully apply a scalable structuring method for graphene dispersions. The method is based on a standard lift-off process, is simple to implement, and increases the film uniformity of graphene devices. It is also compatible with standard semiconductor manufacturing methods. We investigate two different graphene dispersions via Raman spectroscopy and Atomic Force Microscopy and observe no degradation of the material properties by the structuring process. Furthermore, we achieve high uniformity of the structured patterns and homogeneous graphene flake distribution. Electrical characterizations show reproducible sheet resistance values correlating with material quantity and uniformity. Finally, repeatable humidity sensing is demonstrated with van der Pauw devices, with sensing limits of less than 1% relative humidity. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2311_12650 |
| institution | arXiv |
| publishDate | 2023 |
| record_format | arxiv |
| spellingShingle | Reliable lift-off patterning of graphene dispersions for humidity sensors Estévez, Jorge Eduardo Adatti Hecht, Fabian Wittmann, Sebastian Sawallich, Simon Weber, Annika Travan, Caterina Hopperdietzl, Franz Krumbein, Ulrich Lemme, Max Christian Applied Physics Dispersion-based graphene materials are promising candidates for various sensing applications. They offer the advantage of relatively simple and fast deposition via spin-coating, Langmuir-Blodgett deposition, or inkjet printing. Film uniformity and reproducibility remain challenging in all of these deposition methods. Here, we demonstrate, characterize, and successfully apply a scalable structuring method for graphene dispersions. The method is based on a standard lift-off process, is simple to implement, and increases the film uniformity of graphene devices. It is also compatible with standard semiconductor manufacturing methods. We investigate two different graphene dispersions via Raman spectroscopy and Atomic Force Microscopy and observe no degradation of the material properties by the structuring process. Furthermore, we achieve high uniformity of the structured patterns and homogeneous graphene flake distribution. Electrical characterizations show reproducible sheet resistance values correlating with material quantity and uniformity. Finally, repeatable humidity sensing is demonstrated with van der Pauw devices, with sensing limits of less than 1% relative humidity. |
| title | Reliable lift-off patterning of graphene dispersions for humidity sensors |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2311.12650 |