Phase-selective growth of $κ$- vs $β$-Ga$_2$O$_3$ and (In$_x$Ga$_{1-x}$)$_2$O$_3$ by In-mediated metal exchange catalysis in plasma-assisted molecular beam epitaxy

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Autori principali: Ardenghi, A., Bierwagen, O., Lähnemann, J., Kler, J., Falkenstein, A., Martin, M., Mazzolini, P.
Natura: Preprint
Pubblicazione: 2023
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author Ardenghi, A.
Bierwagen, O.
Lähnemann, J.
Kler, J.
Falkenstein, A.
Martin, M.
Mazzolini, P.
author_facet Ardenghi, A.
Bierwagen, O.
Lähnemann, J.
Kler, J.
Falkenstein, A.
Martin, M.
Mazzolini, P.
contents Its piezo- and potentially ferroelectric properties make the metastable kappa polymorph of Ga$_2$O$_3$ an interesting material for multiple applications, while In-incorporation into any polymorphs of Ga$_2$O$_3$ allows to lower their bandgap. In this work, we provide a guideline to achieve single phase $κ$-, $β$-Ga$_2$O$_3$ as well as their (In$_x$Ga$_{1-x}$)$_2$O$_3$ alloys up to x = 0.14 and x = 0.17 respectively, using In-mediated metal exchange catalysis in plasma assisted molecular beam epitaxy (MEXCAT-MBE). The polymorph transition from $κ$ to $β$ is also addressed, highlighting the fundamental role played by the thermal stability of the $κ$-Ga$_2$O$_3$. Additionally, we also demonstrate the possibility to grow ($\bar{2}$01) $β$-Ga$_2$O$_3$ on top of $α$-Al$_2$O$_3$ (0001) at temperatures at least 100 °C above those achievable with conventional non-catalyzed MBE, opening the road for increased crystal quality in heteroepitaxy. The role of the substrate, as well as strain and structural defects in the growth of $κ$-Ga$_2$O$_3$ is also investigated by growing simultaneously on three different materials: (i) $α$-Al$_2$O$_3$ (0001), (ii) 20 nm of ($\bar{2}$01) $β$-Ga$_2$O$_3$ on $α$-Al$_2$O$_3$ (0001) and (iii) ($\bar{2}$01) $β$-Ga$_2$O$_3$ single crystal.
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publishDate 2023
record_format arxiv
spellingShingle Phase-selective growth of $κ$- vs $β$-Ga$_2$O$_3$ and (In$_x$Ga$_{1-x}$)$_2$O$_3$ by In-mediated metal exchange catalysis in plasma-assisted molecular beam epitaxy
Ardenghi, A.
Bierwagen, O.
Lähnemann, J.
Kler, J.
Falkenstein, A.
Martin, M.
Mazzolini, P.
Applied Physics
Materials Science
Its piezo- and potentially ferroelectric properties make the metastable kappa polymorph of Ga$_2$O$_3$ an interesting material for multiple applications, while In-incorporation into any polymorphs of Ga$_2$O$_3$ allows to lower their bandgap. In this work, we provide a guideline to achieve single phase $κ$-, $β$-Ga$_2$O$_3$ as well as their (In$_x$Ga$_{1-x}$)$_2$O$_3$ alloys up to x = 0.14 and x = 0.17 respectively, using In-mediated metal exchange catalysis in plasma assisted molecular beam epitaxy (MEXCAT-MBE). The polymorph transition from $κ$ to $β$ is also addressed, highlighting the fundamental role played by the thermal stability of the $κ$-Ga$_2$O$_3$. Additionally, we also demonstrate the possibility to grow ($\bar{2}$01) $β$-Ga$_2$O$_3$ on top of $α$-Al$_2$O$_3$ (0001) at temperatures at least 100 °C above those achievable with conventional non-catalyzed MBE, opening the road for increased crystal quality in heteroepitaxy. The role of the substrate, as well as strain and structural defects in the growth of $κ$-Ga$_2$O$_3$ is also investigated by growing simultaneously on three different materials: (i) $α$-Al$_2$O$_3$ (0001), (ii) 20 nm of ($\bar{2}$01) $β$-Ga$_2$O$_3$ on $α$-Al$_2$O$_3$ (0001) and (iii) ($\bar{2}$01) $β$-Ga$_2$O$_3$ single crystal.
title Phase-selective growth of $κ$- vs $β$-Ga$_2$O$_3$ and (In$_x$Ga$_{1-x}$)$_2$O$_3$ by In-mediated metal exchange catalysis in plasma-assisted molecular beam epitaxy
topic Applied Physics
Materials Science
url https://arxiv.org/abs/2311.13318