Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes

Fuente: arXiv

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Bibliographic Details
Main Authors:	Cho, Sinwoo, Barrera, Omar, Simeoni, Pietro, Wang, Ellie Y., Kramer, Jack, Chulukhadze, Vakhtang, Campbell, Joshua, Rinaldi, Matteo, Lu, Ruochen
Format:	Preprint
Published:	2023
Subjects:	Signal Processing
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2311.13448