Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes
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| Main Authors: | , , , , , , , , |
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| Format: | Preprint |
| Published: |
2023
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| _version_ | 1866911893220753408 |
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| author | Cho, Sinwoo Barrera, Omar Simeoni, Pietro Wang, Ellie Y. Kramer, Jack Chulukhadze, Vakhtang Campbell, Joshua Rinaldi, Matteo Lu, Ruochen |
| author_facet | Cho, Sinwoo Barrera, Omar Simeoni, Pietro Wang, Ellie Y. Kramer, Jack Chulukhadze, Vakhtang Campbell, Joshua Rinaldi, Matteo Lu, Ruochen |
| contents | This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum (Al) electrodes, i.e., Al top Al bottom, Pt top Al bottom, Al top Pt bottom, and Pt top Pt bottom, are built to study the impact of electrodes on mmWave FBARs. The demonstrated FBAR with Pt top and bottom electrodes achieve electromechanical coupling (k2) of 4.0% and Q of 116 for the first-order symmetric (S1) mode at 13.7 GHz, and k2 of 1.8% and Q of 94 for third-order symmetric (S3) mode at 61.6 GHz. Through these results, we confirmed that even in the frequency band of approximately 60 GHz, ScAlN FBAR can achieve a Q factor approaching 100 with optimized fabrication and acoustic/EM design. Further development calls for stacks with better quality in piezoelectric and metallic layers. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2311_13448 |
| institution | arXiv |
| publishDate | 2023 |
| record_format | arxiv |
| spellingShingle | Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes Cho, Sinwoo Barrera, Omar Simeoni, Pietro Wang, Ellie Y. Kramer, Jack Chulukhadze, Vakhtang Campbell, Joshua Rinaldi, Matteo Lu, Ruochen Signal Processing This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum (Al) electrodes, i.e., Al top Al bottom, Pt top Al bottom, Al top Pt bottom, and Pt top Pt bottom, are built to study the impact of electrodes on mmWave FBARs. The demonstrated FBAR with Pt top and bottom electrodes achieve electromechanical coupling (k2) of 4.0% and Q of 116 for the first-order symmetric (S1) mode at 13.7 GHz, and k2 of 1.8% and Q of 94 for third-order symmetric (S3) mode at 61.6 GHz. Through these results, we confirmed that even in the frequency band of approximately 60 GHz, ScAlN FBAR can achieve a Q factor approaching 100 with optimized fabrication and acoustic/EM design. Further development calls for stacks with better quality in piezoelectric and metallic layers. |
| title | Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes |
| topic | Signal Processing |
| url | https://arxiv.org/abs/2311.13448 |