Area Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding
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arXiv
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| Main Authors: | Tsarapkin, Aleksei, Maćkosz, Krzysztof, Jureddy, Chinmai Sai, Utke, Ivo, Höflich, Katja |
|---|---|
| Format: | Preprint |
| Published: |
2023
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| Subjects: | |
| Online Access: | |
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