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Modeling and Design Optimization of a Linear Motor with Halbach Array for Semiconductor Manufacturing Technology

Fuente: arXiv

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Bibliographic Details
Main Authors:	Mohammadi, Sajjad, Lang, Jeffrey H., Kirtley, James L., Trumper, David L.
Format:	Preprint
Published:	2023
Subjects:	Systems and Control
Online Access:	Acceder al recurso
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