Local laser-induced solid-phase recrystallization of phosphorus-implanted Si/SiGe heterostructures for contacts below 4.2 K

Fuente: arXiv

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Bibliographic Details
Main Authors:	Neul, Malte, Sprave, Isabelle V., Diebel, Laura K., Zinkl, Lukas G., Fuchs, Florian, Yamamoto, Yuji, Vedder, Christian, Bougeard, Dominique, Schreiber, Lars R.
Format:	Preprint
Published:	2023
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2312.06267