Plasma-Based Etching Approach for GEM Detector Microfabrication at FBK for X-ray polarimetry in space

Fuente: arXiv
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Bibliographic Details
Main Authors: Lega, A., Novel, D., Facchinelli, T., Sgro', C., Baldini, L., Minuti, M., Boscardin, M., Pepponi, G., Iuppa, R., Hall-Wilton, R., Latronico, L.
Format: Preprint
Published: 2023
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