Squeeze film absolute pressure sensors with sub-millipascal sensitivity
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arXiv
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| Autori principali: | , , , |
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| Natura: | Preprint |
| Pubblicazione: |
2023
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| _version_ | 1866917683505659904 |
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| author | Salimi, Mohsen Nielsen, Robin V. Pedersen, Henrik B. Dantan, Aurélien |
| author_facet | Salimi, Mohsen Nielsen, Robin V. Pedersen, Henrik B. Dantan, Aurélien |
| contents | We report on the realization of ultrasensitive absolute pressure sensors based on silicon nitride membrane sandwiches. These sandwiches consist in a pair of highly-pretensioned, ultrathin (50 nm), large area (0.25 mm2) films, suspended parallel to each other and forming an ultrashort (500 nm), open cavity. The compression of a gas in this cavity leads to a strong squeeze film force, resulting in an increase in the membrane mechanical resonance frequencies which is directly proportional to the absolute gas pressure. These sandwiches show a record high responsitivity of >300 Hz/Pa in terms of squeeze film-induced frequency shift, which, combined with high quality factor mechanical resonances (Q>10^6), allows for bringing the sensitivity of absolute squeeze film pressure sensors down to the sub-millipascal level. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2312_11915 |
| institution | arXiv |
| publishDate | 2023 |
| record_format | arxiv |
| spellingShingle | Squeeze film absolute pressure sensors with sub-millipascal sensitivity Salimi, Mohsen Nielsen, Robin V. Pedersen, Henrik B. Dantan, Aurélien Applied Physics We report on the realization of ultrasensitive absolute pressure sensors based on silicon nitride membrane sandwiches. These sandwiches consist in a pair of highly-pretensioned, ultrathin (50 nm), large area (0.25 mm2) films, suspended parallel to each other and forming an ultrashort (500 nm), open cavity. The compression of a gas in this cavity leads to a strong squeeze film force, resulting in an increase in the membrane mechanical resonance frequencies which is directly proportional to the absolute gas pressure. These sandwiches show a record high responsitivity of >300 Hz/Pa in terms of squeeze film-induced frequency shift, which, combined with high quality factor mechanical resonances (Q>10^6), allows for bringing the sensitivity of absolute squeeze film pressure sensors down to the sub-millipascal level. |
| title | Squeeze film absolute pressure sensors with sub-millipascal sensitivity |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2312.11915 |