Effect of Overheat and Direct Flow Loading on the MEMS Bistable Flow Sensor

Fuente: arXiv

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Bibliographic Details
Main Authors:	Litvinov, Ivan, Refaeli, Dan, Liberzon, Alex, Krylov, Slava
Format:	Preprint
Published:	2023
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2312.12860