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Annealing reduces Si$_3$N$_4$ microwave-frequency dielectric loss in superconducting resonators

Fuente: arXiv

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Bibliographic Details
Main Authors:	Mittal, Sarang, Adachi, Kazemi, Frattini, Nicholas E., Urmey, Maxwell D., Lin, Sheng-Xiang, Emser, Alec L., Metzger, Cyril, Talamo, Luca, Dickson, Sarah, Carlson, David, Papp, Scott B., Regal, Cindy A., Lehnert, Konrad W.
Format:	Preprint
Published:	2023
Subjects:	Quantum Physics
Online Access:	Acceder al recurso
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