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Improving magnetic-field resilience of NbTiN planar resonators using a hard-mask fabrication technique

Fuente: arXiv

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Bibliographic Details
Main Authors:	Bahr, Arne, Boselli, Matteo, Huard, Benjamin, Bienfait, Audrey
Format:	Preprint
Published:	2023
Subjects:	Quantum Physics Other Condensed Matter
Online Access:	Acceder al recurso
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